A Kinematically Coupled, Nanometer-Resolution Piezo Focus Stage

In this post, the author discusses the focus stage component of the IRIS technique for non-destructive inspection of chips. The focus stage, essential for controlling the sample’s fine positioning, features piezoelectric actuators for precise adjustments. The author describes their process of designing and building the focus stage using affordable parts, specifically piezo actuators intended for automotive use. The post also delves into the concept of kinematic coupling for precise positioning and the challenges faced in electronic design for the system. The author shares that the design is open-source, allowing others to replicate it. However, potential commercialization is hindered by regulatory barriers and uncertainties regarding hardware performance.

https://www.bunniestudios.com/blog/?p=7066

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